Highly-ordered silicon inverted nanocone arrays with broadband light antireflectance
نویسندگان
چکیده
منابع مشابه
Highly-ordered silicon inverted nanocone arrays with broadband light antireflectance
In this work, highly-ordered silicon inverted nanocone arrays are fabricated by integration of nanosphere lithography with reactive ion etching (RIE) method. The optical characteristics of as-prepared Si inverted nanocone arrays are investigated both by experiments and simulations. It is found that the Si nanocone arrays present excellent broadband light antireflectance properties, which are at...
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ژورنال
عنوان ژورنال: Nanoscale Research Letters
سال: 2015
ISSN: 1556-276X
DOI: 10.1186/s11671-014-0718-x